Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films

Karimi Aghda, Soheil; Schneider, Jochen M.; Anders, Andre

doi:HT030072766

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Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films - RWTH-2023-06577

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