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TY  - JOUR
AU  - Fischer, Benedikt
AU  - Nuys, Maurice
AU  - Astakhov, Oleksandr
AU  - Haas, Stefan
AU  - Schaaf, Michael
AU  - Besmehn, Astrid
AU  - Jakes, Peter
AU  - Eichel, Rüdiger-A.
AU  - Rau, Uwe
TI  - Advanced atmospheric pressure CVD of a-Si:H using pure and cyclooctane-diluted trisilane as precursors
JO  - Sustainable energy & fuels
VL  - 8
IS  - 23
SN  - 2398-4902
CY  - Cambridge
PB  - Royal Society of Chemistry
M1  - RWTH-2025-00141
SP  - 5568-5580
PY  - 2024
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001344579800001
DO  - DOI:10.1039/D4SE01308E
UR  - https://publications.rwth-aachen.de/record/1000077
ER  -