% IMPORTANT: The following is UTF-8 encoded. This means that in the presence % of non-ASCII characters, it will not work with BibTeX 0.99 or older. % Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or % “biber”. @PHDTHESIS{MornGuizn:1002751, author = {Morán Guizán, Carla}, othercontributors = {Heinen, Stefan and Issakov, Vadim}, title = {{I}mpedance matching with tunable transmission lines in an advanced semiconductor process}, school = {Rheinisch-Westfälische Technische Hochschule Aachen}, type = {Dissertation}, address = {Aachen}, publisher = {RWTH Aachen University}, reportid = {RWTH-2025-00663}, pages = {1 Online-Ressource : Illustrationen}, year = {2024}, note = {Veröffentlicht auf dem Publikationsserver der RWTH Aachen University 2025; Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2024}, abstract = {This dissertation presents a method for designing tunable impedance matching networks in a 16 nm complementary metal-oxide-semiconductor (CMOS) technology for millimeter-wave applications. Impedance mismatches, particularly between the power amplifier (PA) and the antenna in mm-wave front-ends, result in power loss and reduced efficiency due to reflections. This work proposes innovative tunable transmission line designs to mitigate such issues. Transmission lines are the fundamental building blocks in these matching networks, in particular slow-wave coplanar waveguide (SCPW). A scalable circuit model for these lines is developed, enabling a fast initial selection of dimensions. The tunability is introduced using transistors as switches to connect and disconnect the shield from the ground network, which influences its phase constant and characteristic impedance. Extensive simulations and measurements validate the performance of both standard and tunable transmission lines. The impact of design parameters, transistor size, fill patterns, and wafer variations is thoroughly analyzed. The measurements show good correlation with simulations. The final part of this work presents the design, fabrication, and characterization of tunable impedance matching networks at 77 GHz based on the developed tunable SCPWs. The network design follows a filter-like structure, which allows for a wider matching bandwidth and for more flexibility in the design. The simulation and measurement results demonstrate that these networks effectively adapt load impedances with a voltage standing wave ratio (VSWR) of 2.2 and convert it down to less than 1.5. The average loss of 4.7 dB and the required area are the main drawbacks of this approach, but could be addressed in the future by optimizing of the transmission line designs or exploring alternative technologies like silicon on insulator (SOI) CMOS. Overall, this dissertation contributes to the mm-wave circuit design field by addressing the impedance matching challenge in advanced CMOS processes. The presented tunable impedance matching networks show potential for improving the adaptability of integrated mm-wave front-ends in future wireless communication and sensing applications.}, cin = {616110}, ddc = {621.3}, cid = {$I:(DE-82)616110_20140620$}, typ = {PUB:(DE-HGF)11}, doi = {10.18154/RWTH-2025-00663}, url = {https://publications.rwth-aachen.de/record/1002751}, }