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@PHDTHESIS{Kunze:1003352,
      author       = {Kunze, Rouwen Elia},
      othercontributors = {Schmitt, Robert H. and Schmidt, Michael},
      title        = {{L}ow coherence interferometry for depth monitoring in
                      water jet guided laser micro machining; 1. {A}uflage},
      volume       = {2024,29},
      school       = {RWTH Aachen University},
      type         = {Dissertation},
      address      = {Aachen},
      publisher    = {Apprimus Verlag},
      reportid     = {RWTH-2025-01004},
      isbn         = {978-3-98555-247-4},
      series       = {Ergebnisse aus der Produktionstechnik},
      pages        = {1 Online-Ressource},
      year         = {2025},
      note         = {Druckausgabe: 2025. - Auch veröffentlicht auf dem
                      Publikationsserver der RWTH Aachen University. - Weitere
                      Reihe: Produktionsqualität und Messtechnik.- Weitere Reihe:
                      Edition Wissenschaft Apprimus; Dissertation, RWTH Aachen
                      University, 2024},
      abstract     = {Lasers are a powerful class of production processes that
                      are limited by their specific optical boundary conditions in
                      the generation of structures with high aspect ratios.
                      Guiding the laser beam via a water jet as an optical
                      waveguide enables much greater ablation depths with small
                      lateral structure sizes. This book describes an inline
                      measurement system that enables depth measurement and
                      control of material removal in water jet based laser micro
                      machining.},
      cin          = {417510 / 417200},
      ddc          = {620},
      cid          = {$I:(DE-82)417510_20140620$ / $I:(DE-82)417200_20140620$},
      pnm          = {BMBF 01QE1638C - Verbundprojekt: Herstellung von
                      Formeinsätzen mit hohem Aspektverhältnis durch Einsatz von
                      wasserstrahlgeführter Lasermaterialbearbeitung;
                      Teilprojekt: Entwicklung eines Messsystems für die
                      wasserstrahlgeführte Lasermaterialbearbeitung (01QE1638C)},
      pid          = {G:(BMBF)01QE1638C},
      typ          = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
      doi          = {10.18154/RWTH-2025-01004},
      url          = {https://publications.rwth-aachen.de/record/1003352},
}