%0 Journal Article %A Tröger, Jan %A Kersting, Reinhard %A Hagenhoff, Birgit %A Bougeard, Dominique %A Abrosimov, Nikolay V. %A Klos, Jan %A Schreiber, Lars R. %A Bracht, Hartmut %T Optimizing time-of-flight secondary ion mass spectrometry depth profiles of semiconductor heterostructures Open Access %J Journal of applied physics %V 137 %N 2 %@ 1089-7550 %C Melville, NY %I American Inst. of Physics %M RWTH-2025-01414 %P 025301 %D 2025 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001393491000008 %R 10.1063/5.0232252 %U https://publications.rwth-aachen.de/record/1004400