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%0 Journal Article
%A Tröger, Jan
%A Kersting, Reinhard
%A Hagenhoff, Birgit
%A Bougeard, Dominique
%A Abrosimov, Nikolay V.
%A Klos, Jan
%A Schreiber, Lars R.
%A Bracht, Hartmut
%T Optimizing time-of-flight secondary ion mass spectrometry depth profiles of semiconductor heterostructures Open Access
%J Journal of applied physics
%V 137
%N 2
%@ 1089-7550
%C Melville, NY
%I American Inst. of Physics
%M RWTH-2025-01414
%P 025301
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001393491000008
%R 10.1063/5.0232252
%U https://publications.rwth-aachen.de/record/1004400