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@ARTICLE{Trger:1004400,
      author       = {Tröger, Jan and Kersting, Reinhard and Hagenhoff, Birgit
                      and Bougeard, Dominique and Abrosimov, Nikolay V. and Klos,
                      Jan and Schreiber, Lars R. and Bracht, Hartmut},
      title        = {{O}ptimizing time-of-flight secondary ion mass spectrometry
                      depth profiles of semiconductor heterostructures {O}pen
                      {A}ccess},
      journal      = {Journal of applied physics},
      volume       = {137},
      number       = {2},
      issn         = {1089-7550},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {RWTH-2025-01414},
      pages        = {025301},
      year         = {2025},
      cin          = {132210 / 130000},
      ddc          = {530},
      cid          = {$I:(DE-82)132210_20140620$ / $I:(DE-82)130000_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001393491000008},
      doi          = {10.1063/5.0232252},
      url          = {https://publications.rwth-aachen.de/record/1004400},
}