%0 Journal Article %A Shu, Qi %A Zhou, Kexin %A Kirchbrücher, Arno %A Kalisch, Holger %A Vescan, Andrei %A Debald, Arne %A Heuken, Michael %T Investigation and Reduction of Surface Damage of Etched Quasi-Vertical Gallium Nitride Schottky Diodes %J Physica status solidi / A %V 222 %N 11 %@ 1862-6319 %C Weinheim %I Wiley-VCH %M RWTH-2025-01836 %P 2400880 %D 2025 %Z First published: 17 February 2025 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001509127000003 %R 10.1002/pssa.202400880 %U https://publications.rwth-aachen.de/record/1005548