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@PHDTHESIS{Jiang:1006653,
author = {Jiang, Huijie},
othercontributors = {Ingebrandt, Sven and Knoch, Joachim},
title = {{M}etal-organic framework thin films for microelectronic
chemical and biological sensor applications},
school = {Rheinisch-Westfälische Technische Hochschule Aachen},
type = {Dissertation},
address = {Aachen},
publisher = {RWTH Aachen University},
reportid = {RWTH-2025-02607},
pages = {1 Online-Ressource : Illustrationen},
year = {2025},
note = {Veröffentlicht auf dem Publikationsserver der RWTH Aachen
University; Dissertation, Rheinisch-Westfälische Technische
Hochschule Aachen, 2025},
abstract = {This thesis explores the potential of metal-organic
framework (MOF) thin-film-based microelectronic devices in
chemical and bio-sensing applications. Specifically, one
section focuses on optimizing the MOF thin films for
detecting phthalates in aqueous and non-aqueous media.
Another section examines the dynamics of the cell-substrate
interaction and cellular proliferation on MOF thin-film
substrates. Electrochemical impedance spectroscopy (EIS)
technique is involved in both applications. Two highly
controllable platforms, a microfluidics platform and a dip
coater, were developed in-house for the controlled growth of
high-quality MOF thin films on solid surfaces, employing a
layer-by-layer liquid-phase epitaxy (LbL-LPE) approach. The
process parameters for the microfluidics platform were
optimized to demonstrate scalability for larger-scale dip
coating processes. Subsequently, the optical and electrical
characteristics of the MOF thin films were elucidated using
different approaches. To aid such characterisations, three
lithographic techniques were developed to pattern MOF thin
films using various sacrificial layers, enhancing on-chip
integration. Furthermore, a unique optical characterisation
method was developed to leverage the optical contrast of MOF
thin films on Si/SiO2 substrates for the rapid assessment of
film quality, including homogeneity and thickness. Owing to
their dynamic inherent characteristics reported in the
literature, three different MOF-thin-films, namely
Cu3(HHTP)2 (HHTP = 2,3,6,7,10,11-hexahydroxytriphenylene),
Ni-(BDC-NH2) (BDC-NH2 = 2-aminoterephthaleic acid), and
Fe-(BDC-NH2), were investigated. Firstly, a systematic
investigation was conducted into the fundamental electrical
properties of semiconducting Cu3(HHTP)2 thin-film devices,
including an examination of the effects of rapid thermal
annealing treatment. Additionally, the electrical
characteristics of electrolyte-gated field-effect
transistors (EG-FETs) based on Cu3(HHTP)2 thin films were
studied in phosphate buffer solutions, revealing an
ambipolar transport behaviour dominated by capacitive
gating. The MOF EG-FETs show a very high potential for
ion-sensing in liquid environments. Furthermore, Cu3(HHTP)2
thin-film devices were utilized to investigate the
interaction mechanisms between Cu₃(HHTP)₂ and various
phthalates and phthalate derivatives, indicating that the
observed responses were influenced by factors such as
molecular size, weight, structure, and charge.Secondly, the
detection of phthalates in liquids using EIS with a
two-electrode configuration was demonstrated with
Ni-(BDC-NH2) thin-film devices, which exhibited
dose-dependent responses to diisobutyl phthalate, a crucial
pollutant in water streaming from the polymer
industry.Finally, Fe-(BDC-NH2) thin-film devices were
employed to study the cellular dynamics on MOF substrates
using Electric Cell-substrate Impedance Sensing (ECIS). This
technique enabled the observation of cell dynamics,
including attachment, spreading, and proliferation, over
extended periods, allowing for comparisons between different
cell lines, such as PC-12 and MDCK. In summary, the novel
sensor concepts and sensors based on MOF materials exhibit
highly promising properties for chemical and biological
sensor system applications. The production of thin,
crystalline films with low roughness is highly reproducible
over a large area, and integration into a microsystems
manufacturing process has been achieved. The first sensors
demonstrate very promising properties for the sensitive and
selective detection of phthalates. Additionally, the layers
can be utilized as active substrates for the electronic
detection of cell properties. In both the domains of
biosensorics and bio- and neuroelectronics, considerable
potential exists for the future development of novel
applications for this emerging class of materials.},
cin = {612510},
ddc = {621.3},
cid = {$I:(DE-82)612510_20180607$},
pnm = {DFG project 445865083 - Multiplex-Überwachung von
Antibiotika am Einsatzort durch systemintegrierte
elektrochemische Sensoren auf Basis von metallorganischen
Frameworks (445865083) / China scholarship council
(202004910374)},
pid = {G:(GEPRIS)445865083 / G:(CSC)202004910374},
typ = {PUB:(DE-HGF)11},
doi = {10.18154/RWTH-2025-02607},
url = {https://publications.rwth-aachen.de/record/1006653},
}
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