h1

h2

h3

h4

h5
h6
%0 Journal Article
%A Aliramaji, Shamsa
%A Keuter, Philipp
%A Mráz, Stanislav
%A Neuß, Deborah
%A Hans, Marcus
%A Primetzhofer, Daniel
%A Depla, Diederik
%A Schneider, Jochen M.
%T Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films
%J Surface and coatings technology
%V 510
%@ 1879-3347
%C Amsterdam [u.a.]
%I Elsevier Science
%M RWTH-2025-04540
%P 132216
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001509300700001
%R 10.1016/j.surfcoat.2025.132216
%U https://publications.rwth-aachen.de/record/1011093