%0 Journal Article %A Aliramaji, Shamsa %A Keuter, Philipp %A Mráz, Stanislav %A Neuß, Deborah %A Hans, Marcus %A Primetzhofer, Daniel %A Depla, Diederik %A Schneider, Jochen M. %T Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films %J Surface and coatings technology %V 510 %@ 1879-3347 %C Amsterdam [u.a.] %I Elsevier Science %M RWTH-2025-04540 %P 132216 %D 2025 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001509300700001 %R 10.1016/j.surfcoat.2025.132216 %U https://publications.rwth-aachen.de/record/1011093