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TY  - JOUR
AU  - Aliramaji, Shamsa
AU  - Keuter, Philipp
AU  - Mráz, Stanislav
AU  - Neuß, Deborah
AU  - Hans, Marcus
AU  - Primetzhofer, Daniel
AU  - Depla, Diederik
AU  - Schneider, Jochen M.
TI  - Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films
JO  - Surface and coatings technology
VL  - 510
SN  - 1879-3347
CY  - Amsterdam [u.a.]
PB  - Elsevier Science
M1  - RWTH-2025-04540
SP  - 132216
PY  - 2025
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001509300700001
DO  - DOI:10.1016/j.surfcoat.2025.132216
UR  - https://publications.rwth-aachen.de/record/1011093
ER  -