TY - JOUR AU - Aliramaji, Shamsa AU - Keuter, Philipp AU - Mráz, Stanislav AU - Neuß, Deborah AU - Hans, Marcus AU - Primetzhofer, Daniel AU - Depla, Diederik AU - Schneider, Jochen M. TI - Impurity sources and incorporation pathways during sputter deposition of Mg and Al thin films JO - Surface and coatings technology VL - 510 SN - 1879-3347 CY - Amsterdam [u.a.] PB - Elsevier Science M1 - RWTH-2025-04540 SP - 132216 PY - 2025 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001509300700001 DO - DOI:10.1016/j.surfcoat.2025.132216 UR - https://publications.rwth-aachen.de/record/1011093 ER -