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@ARTICLE{Aliramaji:1011093,
      author       = {Aliramaji, Shamsa and Keuter, Philipp and Mráz, Stanislav
                      and Neuß, Deborah and Hans, Marcus and Primetzhofer, Daniel
                      and Depla, Diederik and Schneider, Jochen M.},
      title        = {{I}mpurity sources and incorporation pathways during
                      sputter deposition of {M}g and {A}l thin films},
      journal      = {Surface and coatings technology},
      volume       = {510},
      issn         = {1879-3347},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {RWTH-2025-04540},
      pages        = {132216},
      year         = {2025},
      cin          = {520000 / 521110 / 041394},
      ddc          = {670},
      cid          = {$I:(DE-82)520000_20140620$ / $I:(DE-82)521110_20140620$ /
                      $I:(DE-82)041394_20200130$},
      pnm          = {DFG project G:(GEPRIS)409476157 - SFB 1394: Strukturelle
                      und chemische atomare Komplexität – Von
                      Defekt-Phasendiagrammen zu Materialeigenschaften (409476157)
                      / OAPKF - Open-Access-Publikation mit Unterstützung der
                      RWTH Aachen University (021000-OAPKF)},
      pid          = {G:(GEPRIS)409476157 / G:(DE-82)021000-OAPKF},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001509300700001},
      doi          = {10.1016/j.surfcoat.2025.132216},
      url          = {https://publications.rwth-aachen.de/record/1011093},
}