%0 Conference Paper %A Kröger, Moritz Alexander %A Bornschlegel, Benedikt %A Kaster, Thomas %A Hinke, Christian Rüdiger %A Holly, Carlo %T Autonomous ultra short pulse ablation process design with Bayesian optimization %V 13351 %C Bellingham, Washington, USA %I SPIE %M RWTH-2025-05210 %B Proceedings of SPIE %D 2025 %< Laser-Based Micro- and Nanoprocessing XIX : 27-31 January 2025, San Francisco, California, United States / Rainer Kling, Wilhelm Pfleging, Koji Sugioka (editors) ; sponsored by: SPIE %B Laser-based Micro- and Nanoprocessing 19 %C 25 Jan 2025 - 31 Jan 2025, San Francisco (USA) Y2 25 Jan 2025 - 31 Jan 2025 M2 San Francisco, USA %F PUB:(DE-HGF)7 ; PUB:(DE-HGF)8 %9 Contribution to a bookContribution to a conference proceedings %U <Go to ISI:>//WOS:001515766500020 %R 10.1117/12.3039141 %U https://publications.rwth-aachen.de/record/1012845