47 Kröger, Moritz Alexander Bornschlegel, Benedikt Kaster, Thomas Hinke, Christian Rüdiger Holly, Carlo 418710 080067 053100 418910 Laser-Based Micro- and Nanoprocessing XIX : 27-31 January 2025, San Francisco, California, United States / Rainer Kling, Wilhelm Pfleging, Koji Sugioka (editors) ; sponsored by: SPIE Laser-based Micro- and Nanoprocessing 19 SPIE Bellingham, Washington, USA San Francisco, USA English 13351 Laser-Based Micro- and Nanoprocessing XIX : 27-31 January 2025, San Francisco, California, United States / Rainer Kling, Wilhelm Pfleging, Koji Sugioka (editors) ; sponsored by: SPIE ; 33, ; PUB:(DE-HGF)7, ; PUB:(DE-HGF)8, ; WOS:001515766500020 Contribution to a book 2025 2025-01-25 - 2025-01-31 RWTH-2025-05210 2025-01-25 - 2025-01-31 2025 https://publications.rwth-aachen.de/record/1012845 https://doi.org/10.1117/12.3039141 <Go to ISI>://WOS:001515766500020