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%0 Journal Article
%A Naghdali, Saeideh
%A Schiester, Maximilian
%A Waldl, Helene
%A Terziyska, Velislava
%A Hans, Marcus
%A Primetzhofer, Daniel
%A Schalk, Nina
%A Tkadletz, Michael
%T Improving the elemental and imaging accuracy in atom probe tomography of (Ti,Si)N single and multilayer coatings using isotopic substitution of N
%J Ultramicroscopy
%V 276
%@ 1879-2723
%C Amsterdam
%I Elsevier Science
%M RWTH-2025-05620
%P 114200
%D 2025
%Z Open access
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1016/j.ultramic.2025.114200
%U https://publications.rwth-aachen.de/record/1013583