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TY  - JOUR
AU  - Naghdali, Saeideh
AU  - Schiester, Maximilian
AU  - Waldl, Helene
AU  - Terziyska, Velislava
AU  - Hans, Marcus
AU  - Primetzhofer, Daniel
AU  - Schalk, Nina
AU  - Tkadletz, Michael
TI  - Improving the elemental and imaging accuracy in atom probe tomography of (Ti,Si)N single and multilayer coatings using isotopic substitution of N
JO  - Ultramicroscopy
VL  - 276
SN  - 1879-2723
CY  - Amsterdam
PB  - Elsevier Science
M1  - RWTH-2025-05620
SP  - 114200
PY  - 2025
N1  - Open access
LB  - PUB:(DE-HGF)16
DO  - DOI:10.1016/j.ultramic.2025.114200
UR  - https://publications.rwth-aachen.de/record/1013583
ER  -