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%0 Thesis
%A Stern, Christian Ferdinand
%T Reactive field assisted sintering of novel rare earth garnets for plasma etching applications
%V 667
%I RWTH Aachen University
%V Dissertation
%C Jülich
%M RWTH-2025-05896
%@ 978-3-95806-833-9
%B Schriften des Forschungszentrums Jülich. Reihe Energie & Umwelt = Energy & environment
%P VII, 101 Seiten : Illustrationen
%D 2025
%Z Dissertation, RWTH Aachen University, 2025
%F PUB:(DE-HGF)11 ; PUB:(DE-HGF)3
%9 Dissertation / PhD ThesisBook
%U https://publications.rwth-aachen.de/record/1014064