%0 Thesis %A Stern, Christian Ferdinand %T Reactive field assisted sintering of novel rare earth garnets for plasma etching applications %V 667 %I RWTH Aachen University %V Dissertation %C Jülich %M RWTH-2025-05896 %@ 978-3-95806-833-9 %B Schriften des Forschungszentrums Jülich. Reihe Energie & Umwelt = Energy & environment %P VII, 101 Seiten : Illustrationen %D 2025 %Z Dissertation, RWTH Aachen University, 2025 %F PUB:(DE-HGF)11 ; PUB:(DE-HGF)3 %9 Dissertation / PhD ThesisBook %U https://publications.rwth-aachen.de/record/1014064