TY - THES AU - Stern, Christian Ferdinand TI - Reactive field assisted sintering of novel rare earth garnets for plasma etching applications VL - 667 PB - RWTH Aachen University VL - Dissertation CY - Jülich M1 - RWTH-2025-05896 SN - 978-3-95806-833-9 T2 - Schriften des Forschungszentrums Jülich. Reihe Energie & Umwelt = Energy & environment SP - VII, 101 Seiten : Illustrationen PY - 2025 N1 - Dissertation, RWTH Aachen University, 2025 LB - PUB:(DE-HGF)11 ; PUB:(DE-HGF)3 UR - https://publications.rwth-aachen.de/record/1014064 ER -