%0 Journal Article %A Kalscheuer, Christian %A Bobzin, Kirsten %A Liu, X. %T Determination of mechanical properties of physical vapor deposition tool coatings using machine learning %J Wear : an international journal on the science and technology of friction, lubrication and wear %V 580/581 %@ 1873-2577 %C Amsterdam [u.a.] %I Elsevier Science %M RWTH-2025-07690 %P 206296 %D 2025 %F PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 %9 Journal ArticleContribution to a book %R 10.1016/j.wear.2025.206296 %U https://publications.rwth-aachen.de/record/1018095