TY - JOUR AU - Kalscheuer, Christian AU - Bobzin, Kirsten AU - Liu, X. TI - Determination of mechanical properties of physical vapor deposition tool coatings using machine learning JO - Wear : an international journal on the science and technology of friction, lubrication and wear VL - 580/581 SN - 1873-2577 CY - Amsterdam [u.a.] PB - Elsevier Science M1 - RWTH-2025-07690 SP - 206296 PY - 2025 LB - PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 DO - DOI:10.1016/j.wear.2025.206296 UR - https://publications.rwth-aachen.de/record/1018095 ER -