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TY - THES AU - Barthels, Thilo TI - Prozessführung bei stark parallelisierten UKP-Bearbeitungsprozessen für Metallfolien PB - Rheinisch-Westfälische Technische Hochschule Aachen VL - Dissertation CY - Aachen M1 - RWTH-2025-09257 SP - 1 Online-Ressource : Illustrationen PY - 2025 N1 - Veröffentlicht auf dem Publikationsserver der RWTH Aachen University 2026 N1 - Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2025 AB - The subject of this dissertation is the scaling of productivity through a multi-beam pro-cessing approach using ultrashort pulsed (USP) laser radiation. For this purpose, a modeling system for the determination of system and process parameters for multi-beam processing is derived. Input variables such as the number of structures, the structure size, the ablation depth and the ablation volume, as well as the material and the maximum pulse energy of the laser are taken into account. With the aim of in-creasing productivity in the parallel micro structuring of thin metal foils, the number of realizable partial beams, the range of repetition rate, partial beam fluence to be used, as well as the track and pulse overlap for a qualitative processing result are derived as output variables of the modeling system. The approach chosen to achieve the goal of qualitative productivity scaling is divided into three subsections: single-beam processing, a data-based computational productivity model based on more than 3,000 single-beam experiments and the determination of qualitative limits to the scalability of multi-beam processing. The first limitations of the productivity increase are worked out using single-beam processing. It is modeled that productivity is primarily maximized with a reduced partial beam fluence and an increasing number of partial beams. As a secondary condition, the number of structures to be produced is important in order to reduce the number of multi-beam processing passes to a minimum. The evaluation of the quality limits of multi-beam processing shows that, in addition to the investigated process parameters of partial beam fluence, repetition rate, track and pulse overlap, the framework conditions not defined by the laser, such as sample holder, process gas or extraction, have greatest influence on quality. Two variables, the available thermal mass for heat absorption and dissipation and keeping the processing field clean by efficiently removing process-related ablation products, are essential here. Convection cooling using process gas and diffusion cooling using a sample holder with full-surface contact to the metal foil is important, as this increases the heat dissipation for the available thermal mass. Ex-traction of the removal products only has an effect on cleanliness. If the thermal mass is not sufficient or a critical removal volume flow occurs, this leads to negative thermal effects. Primarily due to an excessively high repetition rate, foil bulge under increased thermal load or recondensed ablation products form an irreversible bond on already structured surfaces. A process map for the design of productive and qualitative system and process parameters for parallelized ultrashort pulse laser machining processes has emerged from the model and experiments, which are based on the ablation efficiency curve of metals known in the single beam approach according to NEUENSCHWANDER and RACIUKAITIS. Under the constraints of the laser beam source and the optical system to be used, a design and process control recommendation for USP multi-beam processes is made possible. A maximization of the number of partial beams at a partial beam fluence of 2 to 4 times the most efficient single beam fluence and repetition rates of ≤ 50 to 100 kHz are recommended for scaling through multi-beam processing. LB - PUB:(DE-HGF)11 DO - DOI:10.18154/RWTH-2025-09257 UR - https://publications.rwth-aachen.de/record/1020821 ER -