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%0 Journal Article
%A Franke, Jonas Cyrus
%A Liedke, Maciej Oskar
%A Schäfer, Andreas
%A Butterling, Maik
%A Attallah, Ahmed Gamal
%A Hirschmann, Eric
%A Wagner, Andreas
%A Dahlmann, Rainer
%T Comparison of the coating structure of silicon-based pecvd coatings with varying organic content
%J Plasma processes and polymers
%@ 1612-8850
%C Weinheim
%I Wiley-VCH
%M RWTH-2026-00145
%P e70107
%D 2025
%Z First published: 09 December 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001632781200001
%R 10.1002/ppap.70107
%U https://publications.rwth-aachen.de/record/1024550