TY - JOUR AU - Franke, Jonas Cyrus AU - Liedke, Maciej Oskar AU - Schäfer, Andreas AU - Butterling, Maik AU - Attallah, Ahmed Gamal AU - Hirschmann, Eric AU - Wagner, Andreas AU - Dahlmann, Rainer TI - Comparison of the coating structure of silicon-based pecvd coatings with varying organic content JO - Plasma processes and polymers SN - 1612-8850 CY - Weinheim PB - Wiley-VCH M1 - RWTH-2026-00145 SP - e70107 PY - 2025 N1 - First published: 09 December 2025 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001632781200001 DO - DOI:10.1002/ppap.70107 UR - https://publications.rwth-aachen.de/record/1024550 ER -