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TY  - JOUR
AU  - Franke, Jonas Cyrus
AU  - Liedke, Maciej Oskar
AU  - Schäfer, Andreas
AU  - Butterling, Maik
AU  - Attallah, Ahmed Gamal
AU  - Hirschmann, Eric
AU  - Wagner, Andreas
AU  - Dahlmann, Rainer
TI  - Comparison of the coating structure of silicon-based pecvd coatings with varying organic content
JO  - Plasma processes and polymers
SN  - 1612-8850
CY  - Weinheim
PB  - Wiley-VCH
M1  - RWTH-2026-00145
SP  - e70107
PY  - 2025
N1  - First published: 09 December 2025
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001632781200001
DO  - DOI:10.1002/ppap.70107
UR  - https://publications.rwth-aachen.de/record/1024550
ER  -