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001026982 001__ 1026982
001026982 005__ 20260220101523.0
001026982 037__ $$aRWTH-2026-01111
001026982 041__ $$aEnglish
001026982 082__ $$a621.3
001026982 1001_ $$0P:(DE-82)1028155$$aRamesh, Abhilasha$$b0$$urwth
001026982 245__ $$aFabrication and characterization of photonic structures and devices in silicon nitride$$cby Abhilasha Ramesh
001026982 260__ $$aAachen$$c2022
001026982 300__ $$aviii, 70 Seiten : Illustrationen
001026982 3367_ $$02$$2EndNote$$aThesis
001026982 3367_ $$0PUB:(DE-HGF)19$$2PUB:(DE-HGF)$$aMaster Thesis$$bmaster$$mmaster
001026982 3367_ $$2BibTeX$$aMASTERSTHESIS
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001026982 502__ $$aMasterarbeit, RWTH Aachen University, 2022$$bMasterarbeit$$cRWTH Aachen University$$d2022$$gFak06$$o2022-03-31
001026982 5203_ $$lger
001026982 520__ $$leng
001026982 591__ $$aGermany
001026982 7001_ $$0P:(DE-82)IDM01559$$aWitzens, Jeremy$$b1$$eThesis advisor$$urwth
001026982 7001_ $$0P:(DE-82)IDM06510$$aRodrigo, Rebecca$$b2$$eConsultant$$urwth
001026982 8564_ $$uhttps://publications.rwth-aachen.de/record/1026982/files/1026982_titelseite.pdf$$yRestricted
001026982 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-82)1028155$$aRWTH Aachen$$b0$$kRWTH
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001026982 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-82)IDM06510$$aRWTH Aachen$$b2$$kRWTH
001026982 9141_ $$y2022
001026982 961__ $$c2026-02-06T11:04:16.393820$$x2026-01-28T14:10:02.696540$$z2026-02-06T11:04:16.393820
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