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@MASTERSTHESIS{Ramesh:1026982,
      author       = {Ramesh, Abhilasha},
      othercontributors = {Witzens, Jeremy and Rodrigo, Rebecca},
      title        = {{F}abrication and characterization of photonic structures
                      and devices in silicon nitride},
      school       = {RWTH Aachen University},
      type         = {Masterarbeit},
      address      = {Aachen},
      reportid     = {RWTH-2026-01111},
      pages        = {viii, 70 Seiten : Illustrationen},
      year         = {2022},
      note         = {Masterarbeit, RWTH Aachen University, 2022},
      ddc          = {621.3},
      typ          = {PUB:(DE-HGF)19},
      url          = {https://publications.rwth-aachen.de/record/1026982},
}