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001     1026982
005     20260220101523.0
037 _ _ |a RWTH-2026-01111
041 _ _ |a English
082 _ _ |a 621.3
100 1 _ |0 P:(DE-82)1028155
|a Ramesh, Abhilasha
|b 0
|u rwth
245 _ _ |a Fabrication and characterization of photonic structures and devices in silicon nitride
|c by Abhilasha Ramesh
260 _ _ |a Aachen
|c 2022
300 _ _ |a viii, 70 Seiten : Illustrationen
336 7 _ |0 2
|2 EndNote
|a Thesis
336 7 _ |0 PUB:(DE-HGF)19
|2 PUB:(DE-HGF)
|a Master Thesis
|b master
|m master
336 7 _ |2 BibTeX
|a MASTERSTHESIS
336 7 _ |2 DRIVER
|a masterThesis
336 7 _ |2 DataCite
|a Output Types/Supervised Student Publication
336 7 _ |2 ORCID
|a SUPERVISED_STUDENT_PUBLICATION
502 _ _ |a Masterarbeit, RWTH Aachen University, 2022
|b Masterarbeit
|c RWTH Aachen University
|d 2022
|g Fak06
|o 2022-03-31
520 3 _ |l ger
520 _ _ |l eng
591 _ _ |a Germany
700 1 _ |0 P:(DE-82)IDM01559
|a Witzens, Jeremy
|b 1
|e Thesis advisor
|u rwth
700 1 _ |0 P:(DE-82)IDM06510
|a Rodrigo, Rebecca
|b 2
|e Consultant
|u rwth
856 4 _ |u https://publications.rwth-aachen.de/record/1026982/files/1026982_titelseite.pdf
|y Restricted
910 1 _ |0 I:(DE-588b)36225-6
|6 P:(DE-82)1028155
|a RWTH Aachen
|b 0
|k RWTH
910 1 _ |0 I:(DE-588b)36225-6
|6 P:(DE-82)IDM01559
|a RWTH Aachen
|b 1
|k RWTH
910 1 _ |0 I:(DE-588b)36225-6
|6 P:(DE-82)IDM06510
|a RWTH Aachen
|b 2
|k RWTH
914 1 _ |y 2022
980 1 _ |a PublicReference
980 _ _ |a I:(DE-82)616710_20150519
980 _ _ |a UNRESTRICTED
980 _ _ |a master


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