| 001 | 1026982 | ||
| 005 | 20260220101523.0 | ||
| 037 | _ | _ | |a RWTH-2026-01111 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 621.3 |
| 100 | 1 | _ | |0 P:(DE-82)1028155 |a Ramesh, Abhilasha |b 0 |u rwth |
| 245 | _ | _ | |a Fabrication and characterization of photonic structures and devices in silicon nitride |c by Abhilasha Ramesh |
| 260 | _ | _ | |a Aachen |c 2022 |
| 300 | _ | _ | |a viii, 70 Seiten : Illustrationen |
| 336 | 7 | _ | |0 2 |2 EndNote |a Thesis |
| 336 | 7 | _ | |0 PUB:(DE-HGF)19 |2 PUB:(DE-HGF) |a Master Thesis |b master |m master |
| 336 | 7 | _ | |2 BibTeX |a MASTERSTHESIS |
| 336 | 7 | _ | |2 DRIVER |a masterThesis |
| 336 | 7 | _ | |2 DataCite |a Output Types/Supervised Student Publication |
| 336 | 7 | _ | |2 ORCID |a SUPERVISED_STUDENT_PUBLICATION |
| 502 | _ | _ | |a Masterarbeit, RWTH Aachen University, 2022 |b Masterarbeit |c RWTH Aachen University |d 2022 |g Fak06 |o 2022-03-31 |
| 520 | 3 | _ | |l ger |
| 520 | _ | _ | |l eng |
| 591 | _ | _ | |a Germany |
| 700 | 1 | _ | |0 P:(DE-82)IDM01559 |a Witzens, Jeremy |b 1 |e Thesis advisor |u rwth |
| 700 | 1 | _ | |0 P:(DE-82)IDM06510 |a Rodrigo, Rebecca |b 2 |e Consultant |u rwth |
| 856 | 4 | _ | |u https://publications.rwth-aachen.de/record/1026982/files/1026982_titelseite.pdf |y Restricted |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)1028155 |a RWTH Aachen |b 0 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)IDM01559 |a RWTH Aachen |b 1 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)IDM06510 |a RWTH Aachen |b 2 |k RWTH |
| 914 | 1 | _ | |y 2022 |
| 980 | 1 | _ | |a PublicReference |
| 980 | _ | _ | |a I:(DE-82)616710_20150519 |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a master |
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