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001032493 001__ 1032493
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001032493 0247_ $$2ISBN$$a9781510694538
001032493 0247_ $$2ISBN$$a9781510694545
001032493 0247_ $$2ISSN$$a0277-786X
001032493 0247_ $$2ISSN$$a1996-756X
001032493 0247_ $$2SCOPUS$$aSCOPUS:2-s2.0-105024941870
001032493 0247_ $$2WOS$$aWOS:001697778800014
001032493 0247_ $$2doi$$a10.1117/12.3063352
001032493 037__ $$aRWTH-2026-03571
001032493 041__ $$aEnglish
001032493 1001_ $$aLangheinrich, Wolfram$$b0
001032493 1112_ $$a40. European Mask and Lithography Conference$$cDresden$$d2025-06-16 - 2025-06-18$$gEMLC 2025$$wGermany
001032493 245__ $$aFabrication of single-electron shuttling channels in a silicon CMOS fab using high-throughput electron beam lithography$$honline, print
001032493 260__ $$bSPIE$$c2025
001032493 29510 $$a40th European Mask and Lithography Conference (EMLC 2025) : 16–18 June 2025, Dresden, Germany / Jo Finders, Ines Stolberg Editors ; Organized by VDE/VDI GMM – The Society of Microelectronics, Microsystems, and Precision Engineering (Germany)
001032493 300__ $$a6 Seiten
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001032493 4900_ $$aProceedings of SPIE$$v13787
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001032493 591__ $$aGermany
001032493 7001_ $$aBrackmann, Varvara$$b1
001032493 7001_ $$aFriedrich, Michael$$b2
001032493 7001_ $$aWislicenus, Marcus$$b3
001032493 7001_ $$aMuster, Pascal$$b4
001032493 7001_ $$aPregl, Sebastian$$b5
001032493 7001_ $$aReichmann, Felix$$b6
001032493 7001_ $$aKomerički, Nikola$$b7
001032493 7001_ $$aBougeard, Dominique$$b8
001032493 7001_ $$0P:(DE-82)801660$$aHuckemann, Till$$b9$$urwth
001032493 7001_ $$0P:(DE-82)IDM02206$$aSchreiber, Lars R.$$b10$$urwth
001032493 7001_ $$0P:(DE-82)IDM00099$$aBluhm, Jörg$$b11$$urwth
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001032493 9141_ $$y2025
001032493 9151_ $$0StatID:(DE-HGF)0041$$2StatID$$aPeer review status of article unknown$$x0
001032493 9201_ $$0I:(DE-82)132210_20140620$$k132210$$lLehrstuhl für Experimentalphysik und II. Physikalisches Institut$$x0
001032493 9201_ $$0I:(DE-82)130000_20140620$$k130000$$lFachgruppe Physik$$x1
001032493 9201_ $$0I:(DE-82)080043_20160218$$k080043$$lJARA-Institut für Quanteninformation$$x2
001032493 961__ $$c2026-03-25T14:10:10.846849$$x2026-03-25T14:10:10.846849$$z2026-03-25T14:10:10.846849
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