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%0 Journal Article
%A Schmitz, Georg J.
%A Brücker, Christoph
%A Jacobs, P.
%T Manufacture of high-aspect-ratio micro-hair sensor arrays
%J Journal of micromechanics and microengineering
%V 15
%N 10
%@ 0960-1317
%C Bristol
%I IOP Publ.
%M RWTH-CONV-031572
%P 1904-1910
%D 2005
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000233093900024
%R 10.1088/0960-1317/15/10/016
%U https://publications.rwth-aachen.de/record/153110