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@ARTICLE{Schmitz:153110,
      author       = {Schmitz, Georg J. and Brücker, Christoph and Jacobs, P.},
      title        = {{M}anufacture of high-aspect-ratio micro-hair sensor
                      arrays},
      journal      = {Journal of micromechanics and microengineering},
      volume       = {15},
      number       = {10},
      issn         = {0960-1317},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {RWTH-CONV-031572},
      pages        = {1904-1910},
      year         = {2005},
      cin          = {054300 / 053100 / 415110},
      cid          = {$I:(DE-82)054300_20140620$ / $I:(DE-82)053100_20140620$ /
                      $I:(DE-82)415110_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000233093900024},
      doi          = {10.1088/0960-1317/15/10/016},
      url          = {https://publications.rwth-aachen.de/record/153110},
}