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001     153110
005     20210630085648.0
024 7 _ |2 ISSN
|a 0960-1317
024 7 _ |2 ISSN
|a 1361-6439
024 7 _ |2 WOS
|a WOS:000233093900024
024 7 _ |2 DOI
|a 10.1088/0960-1317/15/10/016
024 7 _ |2 HSB
|a alm10026315x
024 7 _ |2 SCOPUS
|a SCOPUS:2-s2.0-24144472844
037 _ _ |a RWTH-CONV-031572
041 _ _ |a English
100 1 _ |0 P:(DE-82)004111
|a Schmitz, Georg J.
|b 0
|e Author
245 _ _ |a Manufacture of high-aspect-ratio micro-hair sensor arrays
|h online, print
260 _ _ |a Bristol
|b IOP Publ.
|c 2005
336 7 _ |0 PUB:(DE-HGF)16
|2 PUB:(DE-HGF)
|a Journal Article
|b journal
|m journal
336 7 _ |2 DataCite
|a Output Types/Journal article
336 7 _ |0 0
|2 EndNote
|a Journal Article
336 7 _ |2 BibTeX
|a ARTICLE
336 7 _ |2 ORCID
|a JOURNAL_ARTICLE
336 7 _ |2 DRIVER
|a article
591 _ _ |a Germany
700 1 _ |0 P:(DE-82)027858
|a Brücker, Christoph
|b 1
|e Author
700 1 _ |0 P:(DE-82)067125
|a Jacobs, P.
|b 2
|e Author
773 _ _ |0 PERI:(DE-600)1480280-6
|a 10.1088/0960-1317/15/10/016
|n 10
|p 1904-1910
|t Journal of micromechanics and microengineering
|v 15
|x 0960-1317
909 C O |o oai:publications.rwth-aachen.de:153110
|p VDB
915 1 _ |0 StatID:(DE-HGF)0031
|2 StatID
|a Peer reviewed article
920 1 _ |0 I:(DE-82)054300_20140620
|k 054300
|l ACCESS e.V. - Materials + Processes
|x 0
920 1 _ |0 I:(DE-82)053100_20140620
|k 053100
|l Fraunhofer-Institut für Lasertechnik - ILT
|x 1
920 1 _ |0 I:(DE-82)415110_20140620
|k 415110
|l Lehrstuhl für Strömungslehre und Aerodynamisches Institut
|x 2
970 _ _ |a alm10026315x
980 _ _ |a journal
980 _ _ |a I:(DE-82)054300_20140620
980 _ _ |a I:(DE-82)053100_20140620
980 _ _ |a I:(DE-82)415110_20140620
980 _ _ |a VDB
980 _ _ |a UNRESTRICTED
980 _ _ |a ConvertedRecord

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