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@ARTICLE{vonFragstein:160069,
      author       = {von Fragstein, Friederike and Schmachtenberg, Ernst and
                      Hegenbart, Andreas Christoph},
      title        = {{M}onitoring of plasma processes by {OES}},
      journal      = {Vakuum in Forschung und Praxis : VIP},
      volume       = {19},
      number       = {S1},
      issn         = {0947-076X},
      address      = {Weinheim},
      publisher    = {WILEY-VCH},
      reportid     = {RWTH-CONV-038242},
      pages        = {39-43},
      year         = {2007},
      cin          = {419310},
      cid          = {$I:(DE-82)419310_20140620$},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1002/vipr.200790042},
      url          = {https://publications.rwth-aachen.de/record/160069},
}