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| 001 | 160069 | ||
| 005 | 20220810091822.0 | ||
| 024 | 7 | _ | |2 ISSN |a 0947-076X |
| 024 | 7 | _ | |2 ISSN |a 1522-2454 |
| 024 | 7 | _ | |2 DOI |a 10.1002/vipr.200790042 |
| 024 | 7 | _ | |2 HSB |a ik200000099x |
| 037 | _ | _ | |a RWTH-CONV-038242 |
| 041 | _ | _ | |a English |
| 100 | 1 | _ | |0 P:(DE-82)006997 |a von Fragstein, Friederike |b 0 |e Author |
| 245 | _ | _ | |a Monitoring of plasma processes by OES |h online, print |
| 260 | _ | _ | |a Weinheim |b WILEY-VCH |c 2007 |
| 336 | 7 | _ | |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |a Journal Article |b journal |m journal |
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| 336 | 7 | _ | |2 ORCID |a JOURNAL_ARTICLE |
| 336 | 7 | _ | |2 DRIVER |a article |
| 591 | _ | _ | |a Germany |
| 700 | 1 | _ | |0 P:(DE-82)041704 |a Schmachtenberg, Ernst |b 1 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)071789 |a Hegenbart, Andreas Christoph |b 2 |e Author |
| 773 | _ | _ | |0 PERI:(DE-600)2045181-7 |a 10.1002/vipr.200790042 |n S1 |p 39-43 |t Vakuum in Forschung und Praxis : VIP |v 19 |x 0947-076X |
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