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TY  - JOUR
AU  - Grosse, Peter
AU  - Harbecke, B.
AU  - Heinz, B.
AU  - Meyer, R.
TI  - Infrared spectroscopy of oxide layers on technical Si wafers
JO  - Applied physics / A, Materials science & processing
VL  - 39
IS  - 4
SN  - 0340-3793
CY  - Berlin [u. a.]
PB  - Springer
M1  - RWTH-CONV-051095
SP  - 257-268
PY  - 1987
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:A1986A518300004
DO  - DOI:10.1007/BF00617270
UR  - https://publications.rwth-aachen.de/record/173816
ER  -