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| 024 | 7 | _ | |2 ISSN |a 0340-3793 |
| 024 | 7 | _ | |2 ISSN |a 0721-7250 |
| 024 | 7 | _ | |2 ISSN |a 0947-8396 |
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| 024 | 7 | _ | |2 DOI |a 10.1007/BF00617270 |
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| 037 | _ | _ | |a RWTH-CONV-051095 |
| 041 | _ | _ | |a English |
| 100 | 1 | _ | |0 P:(DE-82)028743 |a Grosse, Peter |b 0 |e Author |
| 245 | _ | _ | |a Infrared spectroscopy of oxide layers on technical Si wafers |h online, print |
| 260 | _ | _ | |a Berlin [u. a.] |b Springer |c 1987 |
| 336 | 7 | _ | |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |a Journal Article |b journal |m journal |
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| 700 | 1 | _ | |0 P:(DE-82)026482 |a Harbecke, B. |b 1 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)026483 |a Heinz, B. |b 2 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)014292 |a Meyer, R. |b 3 |e Author |
| 773 | _ | _ | |0 PERI:(DE-600)1398311-8 |a 10.1007/BF00617270 |n 4 |p 257-268 |t Applied physics / A, Materials science & processing |v 39 |x 0340-3793 |
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