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000183676 001__ 183676 000183676 005__ 20201204105438.0 000183676 0247_ $$2ISSN$$a0022-3727 000183676 0247_ $$2ISSN$$a0262-8171 000183676 0247_ $$2ISSN$$a1361-6463 000183676 0247_ $$2WOS$$aWOS:000260156200030 000183676 0247_ $$2DOI$$a10.1088/0022-3727/41/21/215301 000183676 0247_ $$2HSB$$a999910054306 000183676 0247_ $$2SCOPUS$$aSCOPUS:2-s2.0-58149342089 000183676 037__ $$aRWTH-CONV-060239 000183676 041__ $$aEnglish 000183676 1001_ $$0P:(DE-82)016251$$aSarakinos, K.$$b0$$eAuthor 000183676 245__ $$aA semi-quantitative model for the deposition rate in non-reactive high power pulsed magnetron sputtering$$honline, print 000183676 260__ $$aBristol$$bIOP Publ.$$c2008 000183676 300__ $$a9 S. 000183676 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal 000183676 3367_ $$2DataCite$$aOutput Types/Journal article 000183676 3367_ $$00$$2EndNote$$aJournal Article 000183676 3367_ $$2BibTeX$$aARTICLE 000183676 3367_ $$2ORCID$$aJOURNAL_ARTICLE 000183676 3367_ $$2DRIVER$$aarticle 000183676 591__ $$aGermany 000183676 7001_ $$0P:(DE-82)008005$$aAlami, Jones$$b1$$eAuthor 000183676 7001_ $$0P:(DE-82)016433$$aDukwen, Julia$$b2$$eAuthor 000183676 7001_ $$0P:(DE-82)104696$$aWördenweber, Jan$$b3$$eAuthor 000183676 7001_ $$0P:(DE-82)IDM00089$$aWuttig, Matthias$$b4$$eAuthor 000183676 773__ $$0PERI:(DE-600)1472948-9$$a10.1088/0022-3727/41/21/215301$$n21$$p215301$$tJournal of physics / D, Applied physics$$v41$$x0022-3727 000183676 909CO $$ooai:publications.rwth-aachen.de:183676$$pVDB 000183676 9151_ $$0StatID:(DE-HGF)0031$$2StatID$$aPeer reviewed article 000183676 9201_ $$0I:(DE-82)130000_20140620$$k130000$$lFachgruppe Physik$$x0 000183676 9201_ $$0I:(DE-82)131110_20140620$$k131110$$lLehrstuhl für Experimentalphysik I A und I. Physikalisches Institut$$x1 000183676 961__ $$c2014-12-01$$x2011-07-29$$z2012-02-20 000183676 970__ $$ahsb999910054306 000183676 980__ $$ajournal 000183676 980__ $$aI:(DE-82)130000_20140620 000183676 980__ $$aI:(DE-82)131110_20140620 000183676 980__ $$aVDB 000183676 980__ $$aUNRESTRICTED 000183676 980__ $$aConvertedRecord