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%0 Journal Article
%A Kurapova, O.
%A Lengeler, Bruno
%A Schroer, C. G.
%A Kuechler, M.
%A Gessner, T.
%A van der Hart, A.
%T Optimized fabrication of silicon nanofocusing x-ray lenses using deep reactive ion etching
%J Journal of vacuum science & technology : JVST / B
%V 25
%N 5
%@ 0734-211x
%C New York, NY
%I American Vacuum Society
%M RWTH-CONV-064475
%P 1626-1629
%D 2007
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000250433500015
%R 10.1116/1.2769361
%U https://publications.rwth-aachen.de/record/188130