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TY  - JOUR
AU  - Kurapova, O.
AU  - Lengeler, Bruno
AU  - Schroer, C. G.
AU  - Kuechler, M.
AU  - Gessner, T.
AU  - van der Hart, A.
TI  - Optimized fabrication of silicon nanofocusing x-ray lenses using deep reactive ion etching
JO  - Journal of vacuum science & technology : JVST / B
VL  - 25
IS  - 5
SN  - 0734-211x
CY  - New York, NY
PB  - American Vacuum Society
M1  - RWTH-CONV-064475
SP  - 1626-1629
PY  - 2007
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000250433500015
DO  - DOI:10.1116/1.2769361
UR  - https://publications.rwth-aachen.de/record/188130
ER  -