guest ::
| 001 | 188130 | ||
| 005 | 20201203140408.0 | ||
| 024 | 7 | _ | |2 ISSN |a 1071-1023 |
| 024 | 7 | _ | |2 ISSN |a 0734-211x |
| 024 | 7 | _ | |2 WOS |a WOS:000250433500015 |
| 024 | 7 | _ | |2 DOI |a 10.1116/1.2769361 |
| 024 | 7 | _ | |2 HSB |a 999910098874 |
| 024 | 7 | _ | |2 SCOPUS |a SCOPUS:2-s2.0-34648824399 |
| 037 | _ | _ | |a RWTH-CONV-064475 |
| 041 | _ | _ | |a English |
| 100 | 1 | _ | |0 P:(DE-82)026535 |a Kurapova, O. |b 0 |e Author |
| 245 | _ | _ | |a Optimized fabrication of silicon nanofocusing x-ray lenses using deep reactive ion etching |h online, print |
| 260 | _ | _ | |a New York, NY |b American Vacuum Society |c 2007 |
| 336 | 7 | _ | |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |a Journal Article |b journal |m journal |
| 336 | 7 | _ | |2 DataCite |a Output Types/Journal article |
| 336 | 7 | _ | |0 0 |2 EndNote |a Journal Article |
| 336 | 7 | _ | |2 BibTeX |a ARTICLE |
| 336 | 7 | _ | |2 ORCID |a JOURNAL_ARTICLE |
| 336 | 7 | _ | |2 DRIVER |a article |
| 591 | _ | _ | |a Germany |
| 700 | 1 | _ | |0 P:(DE-82)041977 |a Lengeler, Bruno |b 1 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)026531 |a Schroer, C. G. |b 2 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)143755 |a Kuechler, M. |b 3 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)143756 |a Gessner, T. |b 4 |e Author |
| 700 | 1 | _ | |0 P:(DE-82)142108 |a van der Hart, A. |b 5 |e Author |
| 773 | _ | _ | |0 PERI:(DE-600)1475429-0 |a 10.1116/1.2769361 |n 5 |p 1626-1629 |t Journal of vacuum science & technology : JVST / B |v 25 |x 0734-211x |
| 909 | C | O | |o oai:publications.rwth-aachen.de:188130 |p VDB |
| 915 | 1 | _ | |0 StatID:(DE-HGF)0031 |2 StatID |a Peer reviewed article |
| 920 | 1 | _ | |0 I:(DE-82)132310_20140620 |k 132310 |l Lehrstuhl für Experimentalphysik (Festkörperphysik) und II. Physikalisches Institut |x 0 |
| 920 | 1 | _ | |0 I:(DE-82)hsbk010098_20140620 |k hsbk010098 |l Physikalisches Institut II |x 1 |
| 920 | 1 | _ | |0 I:(DE-82)130000_20140620 |k 130000 |l Fachgruppe Physik |x 2 |
| 970 | _ | _ | |a hsb999910098874 |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-82)132310_20140620 |
| 980 | _ | _ | |a I:(DE-82)hsbk010098_20140620 |
| 980 | _ | _ | |a I:(DE-82)130000_20140620 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a ConvertedRecord |
| Library | Collection | CLSMajor | CLSMinor | Language | Author |
|---|