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%0 Journal Article
%A Kunkemöller, Georg
%A Maß, Tobias Wilhelm Wolfgang
%A Michel, Ann-Katrin U.
%A Kim, Hyun-Su
%A Brose, Sascha
%A Danylyuk, Serhiy
%A Taubner, Thomas
%A Juschkin, Larissa
%T Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
%J Optics express
%V 23
%N 20
%@ 1094-4087
%C Washington, DC
%I Optical Society of America
%M RWTH-2015-05140
%P 25487-25495
%D 2015
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000365077900008
%$ pmid:26480066
%R 10.1364/OE.23.025487
%U https://publications.rwth-aachen.de/record/538246