h1

h2

h3

h4

h5
h6
TY  - JOUR
AU  - Kunkemöller, Georg
AU  - Maß, Tobias Wilhelm Wolfgang
AU  - Michel, Ann-Katrin U.
AU  - Kim, Hyun-Su
AU  - Brose, Sascha
AU  - Danylyuk, Serhiy
AU  - Taubner, Thomas
AU  - Juschkin, Larissa
TI  - Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
JO  - Optics express
VL  - 23
IS  - 20
SN  - 1094-4087
CY  - Washington, DC
PB  - Optical Society of America
M1  - RWTH-2015-05140
SP  - 25487-25495
PY  - 2015
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000365077900008
C6  - pmid:26480066
DO  - DOI:10.1364/OE.23.025487
UR  - https://publications.rwth-aachen.de/record/538246
ER  -