TY - JOUR AU - Kunkemöller, Georg AU - Maß, Tobias Wilhelm Wolfgang AU - Michel, Ann-Katrin U. AU - Kim, Hyun-Su AU - Brose, Sascha AU - Danylyuk, Serhiy AU - Taubner, Thomas AU - Juschkin, Larissa TI - Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas JO - Optics express VL - 23 IS - 20 SN - 1094-4087 CY - Washington, DC PB - Optical Society of America M1 - RWTH-2015-05140 SP - 25487-25495 PY - 2015 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000365077900008 C6 - pmid:26480066 DO - DOI:10.1364/OE.23.025487 UR - https://publications.rwth-aachen.de/record/538246 ER -