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@ARTICLE{Kunkemller:538246,
      author       = {Kunkemöller, Georg and Maß, Tobias Wilhelm Wolfgang and
                      Michel, Ann-Katrin U. and Kim, Hyun-Su and Brose, Sascha and
                      Danylyuk, Serhiy and Taubner, Thomas and Juschkin, Larissa},
      title        = {{E}xtreme ultraviolet proximity lithography for fast,
                      flexible and parallel fabrication of infrared antennas},
      journal      = {Optics express},
      volume       = {23},
      number       = {20},
      issn         = {1094-4087},
      address      = {Washington, DC},
      publisher    = {Optical Society of America},
      reportid     = {RWTH-2015-05140},
      pages        = {25487-25495},
      year         = {2015},
      cin          = {418910 / 080009 / 131820 / 139420 / 130000 / 136720},
      ddc          = {530},
      cid          = {$I:(DE-82)418910_20140620$ / $I:(DE-82)080009_20140620$ /
                      $I:(DE-82)131820_20140620$ / $I:(DE-82)139420_20140620$ /
                      $I:(DE-82)130000_20140620$ / $I:(DE-82)136720_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000365077900008},
      pubmed       = {pmid:26480066},
      doi          = {10.1364/OE.23.025487},
      url          = {https://publications.rwth-aachen.de/record/538246},
}