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001     538246
005     20201223135731.0
024 7 _ |a 1094-4087
|2 ISSN
024 7 _ |a SCOPUS:2-s2.0-84943750490
|2 SCOPUS
024 7 _ |a WOS:000365077900008
|2 WOS
024 7 _ |a 10.18154/RWTH-2015-05140
|2 datacite_doi
024 7 _ |a 10.1364/OE.23.025487
|2 doi
024 7 _ |a pmid:26480066
|2 pmid
037 _ _ |a RWTH-2015-05140
041 _ _ |a English
082 _ _ |a 530
100 1 _ |0 P:(DE-82)538310
|a Kunkemöller, Georg
|b 0
245 _ _ |a Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
|h online
260 _ _ |a Washington, DC
|b Optical Society of America
|c 2015
336 7 _ |0 0
|2 EndNote
|a Journal Article
336 7 _ |0 PUB:(DE-HGF)16
|2 PUB:(DE-HGF)
|a Journal Article
|b journal
|m journal
336 7 _ |2 BibTeX
|a ARTICLE
336 7 _ |2 DRIVER
|a article
336 7 _ |2 DataCite
|a Output Types/Journal article
336 7 _ |2 ORCID
|a JOURNAL_ARTICLE
588 _ _ |a Dataset connected to CrossRef
591 _ _ |a Germany
700 1 _ |0 P:(DE-82)IDM00128
|a Maß, Tobias Wilhelm Wolfgang
|b 1
700 1 _ |0 P:(DE-82)172785
|a Michel, Ann-Katrin U.
|b 2
700 1 _ |0 P:(DE-82)174586
|a Kim, Hyun-Su
|b 3
700 1 _ |0 P:(DE-82)IDM01149
|a Brose, Sascha
|b 4
700 1 _ |0 P:(DE-82)IDM02633
|a Danylyuk, Serhiy
|b 5
|u rwth
700 1 _ |0 P:(DE-82)IDM00127
|a Taubner, Thomas
|b 6
700 1 _ |0 P:(DE-82)IDM01488
|a Juschkin, Larissa
|b 7
|e Corresponding author
|u rwth
773 _ _ |0 PERI:(DE-600)1491859-6
|a 10.1364/OE.23.025487
|n 20
|p 25487-25495
|t Optics express
|v 23
|x 1094-4087
|y 2015
856 4 _ |u https://publications.rwth-aachen.de/record/538246/files/538246.pdf
|y OpenAccess
856 4 _ |u https://publications.rwth-aachen.de/record/538246/files/538246.gif?subformat=icon
|x icon
|y OpenAccess
856 4 _ |u https://publications.rwth-aachen.de/record/538246/files/538246.jpg?subformat=icon-180
|x icon-180
|y OpenAccess
856 4 _ |u https://publications.rwth-aachen.de/record/538246/files/538246.jpg?subformat=icon-700
|x icon-700
|y OpenAccess
909 C O |o oai:publications.rwth-aachen.de:538246
|p openaire
|p open_access
|p driver
|p dnbdelivery
|p VDB
910 1 _ |0 I:(DE-588b)36225-6
|6 P:(DE-82)IDM02633
|a RWTH Aachen
|b 5
|k RWTH
910 1 _ |0 I:(DE-588b)36225-6
|6 P:(DE-82)IDM01488
|a RWTH Aachen
|b 7
|k RWTH
914 1 _ |y 2015
915 1 _ |0 StatID:(DE-HGF)0031
|2 StatID
|a Peer reviewed article
915 _ _ |0 LIC:(DE-HGF)PublisherOA
|2 HGFVOC
|a Free to read
915 _ _ |0 StatID:(DE-HGF)0100
|2 StatID
|a JCR
|b OPT EXPRESS : 2014
915 _ _ |0 StatID:(DE-HGF)0110
|2 StatID
|a WoS
|b Science Citation Index
915 _ _ |0 StatID:(DE-HGF)0111
|2 StatID
|a WoS
|b Science Citation Index Expanded
915 _ _ |0 StatID:(DE-HGF)0150
|2 StatID
|a DBCoverage
|b Web of Science Core Collection
915 _ _ |0 StatID:(DE-HGF)0199
|2 StatID
|a DBCoverage
|b Thomson Reuters Master Journal List
915 _ _ |0 StatID:(DE-HGF)0200
|2 StatID
|a DBCoverage
|b SCOPUS
915 _ _ |0 StatID:(DE-HGF)0300
|2 StatID
|a DBCoverage
|b Medline
915 _ _ |0 StatID:(DE-HGF)0500
|2 StatID
|a DBCoverage
|b DOAJ
915 _ _ |0 StatID:(DE-HGF)0510
|2 StatID
|a OpenAccess
915 _ _ |0 StatID:(DE-HGF)1150
|2 StatID
|a DBCoverage
|b Current Contents - Physical, Chemical and Earth Sciences
915 _ _ |0 StatID:(DE-HGF)9900
|2 StatID
|a IF < 5
920 1 _ |0 I:(DE-82)418910_20140620
|k 418910
|l Lehrstuhl für Technologie optischer Systeme
|x 0
920 1 _ |0 I:(DE-82)080009_20140620
|k 080009
|l JARA-FIT
|x 1
920 1 _ |0 I:(DE-82)131820_20140620
|k 131820
|l Lehr- und Forschungsgebiet Physik
|x 2
920 1 _ |0 I:(DE-82)139420_20140620
|k 139420
|l Lehr- und Forschungsgebiet für Experimentalphysik
|x 3
920 1 _ |0 I:(DE-82)130000_20140620
|k 130000
|l Fachgruppe Physik
|x 4
920 1 _ |0 I:(DE-82)136720_20140620
|k 136720
|l Lehr- und Forschungsgebiet Metamaterialien und Nano-Optik
|x 5
980 1 _ |a FullTexts
980 _ _ |a I:(DE-82)080009_20140620
980 _ _ |a I:(DE-82)130000_20140620
980 _ _ |a I:(DE-82)131820_20140620
980 _ _ |a I:(DE-82)136720_20140620
980 _ _ |a I:(DE-82)139420_20140620
980 _ _ |a I:(DE-82)418910_20140620
980 _ _ |a UNRESTRICTED
980 _ _ |a VDB
980 _ _ |a journal

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