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%0 Thesis
%A Perera Mercado, Yibran Argenis
%T Diamond-like carbon and ceramic materials as protective coatings grown by pulsed laser deposition
%C Aachen
%I Publikationsserver der RWTH Aachen University
%M RWTH-CONV-123657
%P IV, 100 S. : Ill., graph. Darst.
%D 2004
%Z Aachen, Techn. Hochsch., Diss., 2003
%X A rather large number of nitride, carbide, and oxide thin films are used as hard and wear-resistant coatings, for optical, corrosive, and refractory applications that are of crucial importance. Additional requirements place even more stringent conditions on the deposition processes. The properties of coatings deposited by pulsed laser deposition are determined by the deposition parameters, the composition of the PLD plasma and its ionization states, the substrate conditions, etc.. In this way, the advantageous properties of PLD can be used with the general aim to increase the adhesion of the high quality PLD thin films to offer new applications where the hard, optical, and/or thermal coatings are required to contribute to surface engineering. A first objective has been to shine some light on the optical and mechanical properties of smooth, homogeneous, and adherent SiNx ceramic coatings which have been deposited on different substrates such as glass, silicon wafer, tool steels, and tungsten carbide (WC-10
%K Siliciumnitrid (SWD)
%K Impulslaserbeschichten (SWD)
%K Dünne Schicht (SWD)
%K Stoffeigenschaft (SWD)
%K Diamantähnlicher Kohlenstoff (SWD)
%K Aluminiumoxide (SWD)
%F PUB:(DE-HGF)11
%9 Dissertation / PhD Thesis
%U https://publications.rwth-aachen.de/record/62059