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TY - JOUR AU - Hüser, Dorothee AU - Häßler-Grohne, Wolfgang AU - Hüser, Jonathan TI - Geometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopes JO - Measurement science and technology VL - 24 IS - 11 SN - 1361-6501 CY - Bristol PB - IOP Publ. M1 - RWTH-2017-09315 SP - 115008 PY - 2013 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000325847000008 DO - DOI:10.1088/0957-0233/24/11/115008 UR - https://publications.rwth-aachen.de/record/707596 ER -