engHüser, DorotheeHäßler-Grohne, WolfgangHüser, JonathanGeometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopesinfo:eu-repo/classification/ddc/600Measurement science and technology 24(11), 115008 (2013). doi:10.1088/0957-0233/24/11/115008info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersionIOP Publ.2013info:eu-repo/semantics/closedAccessDEhttps://publications.rwth-aachen.de/record/707596https://publications.rwth-aachen.de/search?p=id:%22RWTH-2017-09315%22Researchersinfo:eu-repo/semantics/altIdentifier/issn/0950-7671info:eu-repo/semantics/altIdentifier/issn/0957-0233info:eu-repo/semantics/altIdentifier/issn/0022-3735info:eu-repo/semantics/altIdentifier/doi/10.1088/0957-0233/24/11/115008info:eu-repo/semantics/altIdentifier/issn/1361-6501info:eu-repo/semantics/altIdentifier/issn/0368-4253info:eu-repo/semantics/altIdentifier/issn/0950-1290info:eu-repo/semantics/altIdentifier/wos/WOS:000325847000008info:eu-repo/semantics/altIdentifier/issn/0368-4261