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%0 Journal Article
%A He, Chao
%A Steger, Michael
%A Gillner, Arnold
%T High-Efficiency Nanostructuring using Multi-Beam Interference by Consecutively Deposited Ultrashort Laser Pulses on Tool Steel
%J Journal of Laser Micro/Nanoengineering
%V 13
%N 1
%@ 1880-0688
%C Osaka
%M RWTH-2018-224229
%P 1-5
%D 2018
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000439897500001
%R 10.2961/jlmn.2018.01.0001
%U https://publications.rwth-aachen.de/record/723482