000723482 001__ 723482 000723482 005__ 20231221075515.0 000723482 0247_ $$2ISSN$$a1880-0688 000723482 0247_ $$2WOS$$aWOS:000439897500001 000723482 0247_ $$2doi$$a10.2961/jlmn.2018.01.0001 000723482 0247_ $$2SCOPUS$$aSCOPUS:2-s2.0-85046338410 000723482 037__ $$aRWTH-2018-224229 000723482 041__ $$aEnglish 000723482 082__ $$a530 000723482 1001_ $$0P:(DE-82)190953$$aHe, Chao$$b0$$eCorresponding author$$urwth 000723482 245__ $$aHigh-Efficiency Nanostructuring using Multi-Beam Interference by Consecutively Deposited Ultrashort Laser Pulses on Tool Steel$$honline 000723482 260__ $$aOsaka$$c2018 000723482 3367_ $$00$$2EndNote$$aJournal Article 000723482 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal 000723482 3367_ $$2BibTeX$$aARTICLE 000723482 3367_ $$2DRIVER$$aarticle 000723482 3367_ $$2DataCite$$aOutput Types/Journal article 000723482 3367_ $$2ORCID$$aJOURNAL_ARTICLE 000723482 536__ $$0G:(DE-82)X080025-C-3$$aC-3 - Multi-Technology Products (X080025-C-3)$$cX080025-C-3$$x0 000723482 536__ $$0G:(GEPRIS)25065172$$aDFG project 25065172 - EXC 128: Integrative Produktionstechnik für Hochlohnländer (25065172)$$c25065172$$x1 000723482 588__ $$aDataset connected to CrossRef 000723482 591__ $$aGermany 000723482 7001_ $$0P:(DE-82)692089$$aSteger, Michael$$b1$$urwth 000723482 7001_ $$0P:(DE-82)008827$$aGillner, Arnold$$b2$$urwth 000723482 773__ $$0PERI:(DE-600)2695455-2$$a10.2961/jlmn.2018.01.0001$$n1$$p1-5$$tJournal of Laser Micro/Nanoengineering$$v13$$x1880-0688$$y2018 000723482 909CO $$ooai:publications.rwth-aachen.de:723482$$pVDB 000723482 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-82)190953$$aRWTH Aachen$$b0$$kRWTH 000723482 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-82)692089$$aRWTH Aachen$$b1$$kRWTH 000723482 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-82)008827$$aRWTH Aachen$$b2$$kRWTH 000723482 9141_ $$y2018 000723482 9151_ $$0StatID:(DE-HGF)0031$$2StatID$$aPeer reviewed article$$x0 000723482 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bJ LASER MICRO NANOEN : 2015 000723482 915__ $$0StatID:(DE-HGF)0111$$2StatID$$aWoS$$bScience Citation Index Expanded 000723482 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection 000723482 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bThomson Reuters Master Journal List 000723482 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS 000723482 915__ $$0StatID:(DE-HGF)0501$$2StatID$$aDBCoverage$$bDOAJ Seal 000723482 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences 000723482 915__ $$0StatID:(DE-HGF)1160$$2StatID$$aDBCoverage$$bCurrent Contents - Engineering, Computing and Technology 000723482 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5 000723482 9201_ $$0I:(DE-82)418710_20140620$$k418710$$lLehrstuhl für Lasertechnik$$x0 000723482 9201_ $$0I:(DE-82)053100_20140620$$k053100$$lFraunhofer-Institut für Lasertechnik - ILT$$x1 000723482 9201_ $$0I:(DE-82)080025_20140620$$k080025$$lIntegrative Produktionstechnik für Hochlohnländer$$x2 000723482 961__ $$c2018-05-15T15:54:59.402116$$x2018-05-15T15:54:59.402116$$z2018-05-17 000723482 980__ $$aI:(DE-82)053100_20140620 000723482 980__ $$aI:(DE-82)080025_20140620 000723482 980__ $$aI:(DE-82)418710_20140620 000723482 980__ $$aUNRESTRICTED 000723482 980__ $$aVDB 000723482 980__ $$ajournal