TY - JOUR AU - He, Chao AU - Steger, Michael AU - Gillner, Arnold TI - High-Efficiency Nanostructuring using Multi-Beam Interference by Consecutively Deposited Ultrashort Laser Pulses on Tool Steel JO - Journal of Laser Micro/Nanoengineering VL - 13 IS - 1 SN - 1880-0688 CY - Osaka M1 - RWTH-2018-224229 SP - 1-5 PY - 2018 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000439897500001 DO - DOI:10.2961/jlmn.2018.01.0001 UR - https://publications.rwth-aachen.de/record/723482 ER -