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@ARTICLE{He:723482,
      author       = {He, Chao and Steger, Michael and Gillner, Arnold},
      title        = {{H}igh-{E}fficiency {N}anostructuring using {M}ulti-{B}eam
                      {I}nterference by {C}onsecutively {D}eposited {U}ltrashort
                      {L}aser {P}ulses on {T}ool {S}teel},
      journal      = {Journal of Laser Micro/Nanoengineering},
      volume       = {13},
      number       = {1},
      issn         = {1880-0688},
      address      = {Osaka},
      reportid     = {RWTH-2018-224229},
      pages        = {1-5},
      year         = {2018},
      cin          = {418710 / 053100 / 080025},
      ddc          = {530},
      cid          = {$I:(DE-82)418710_20140620$ / $I:(DE-82)053100_20140620$ /
                      $I:(DE-82)080025_20140620$},
      pnm          = {C-3 - Multi-Technology Products (X080025-C-3) / DFG project
                      25065172 - EXC 128: Integrative Produktionstechnik für
                      Hochlohnländer (25065172)},
      pid          = {G:(DE-82)X080025-C-3 / G:(GEPRIS)25065172},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000439897500001},
      doi          = {10.2961/jlmn.2018.01.0001},
      url          = {https://publications.rwth-aachen.de/record/723482},
}