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%0 Thesis
%A Hördemann, Christian
%T Partikelfreier Abtrag von Schichtsystemen für Feststoffbatterien mittels Ultrakurzpuls-Laserbearbeitung; 1. Auflage
%I RWTH Aachen University
%V Dissertation
%C Aachen
%M RWTH-2018-226897
%@ 978-3-86359-648-4
%B Ergebnisse aus der Lasertechnik
%P 1 Online-Ressource (vi, 153 Seiten) : Illustrationen
%D 2018
%Z Veröffentlicht auf dem Publikationsserver der RWTH Aachen University. - Weitere Reihe: Edition Wissenschaft Apprimus
%Z Dissertation, RWTH Aachen University, 2018
%X One promising battery technology is the technology of solid-state thin-film batteries which are fabricated via subsequent evaporation deposition of thin battery layers. Currently, solid-state thin-film batteries are costly since their production is carried out with manufacturing methods that are typically used in the semiconductor industry. When depositing the battery layers one above the other, masks have to be used that leave out large areas between each battery cell. These areas cannot be used for further battery cell production. To improve the production of solid-state thin-film batteries in terms of its material- and resource efficiency as well as make an important step towards the continuous production of this battery-type, roll to roll manufacturing is beneficial. In continuous flow sputtering- and deposition equipment, battery layers can be applied to a foil substrate which can then be cut into single battery cells creating minimal waste. In this work, an ultrashort-pulsed laser ablation process for the selective removal of solid state multilayer systems in an inert gas atmosphere is developed. Special attention is paid to the generation of particles that arise from the laser ablation process and the removal of these. By an analysis of the particle propagation as well as the conception and construction of an apparatus for the particle-free processing of coated foils, conclusions can be drawn about the achievable surface cleanliness during laser ablation within a gas-flowed gap. For the laser ablation within the stack of battery layers it can be deducted, that a layer-selective removal of the multilayer system can only be achieved if ultrashort laser pulses in the femtosecond regime are used. Larger pulse durations lead to unwanted cracking of the material, resulting in a geometrically imprecise ablation. The maximum height of particles that are ejected during ablation is reached during the first 100 µs after the impact of the laser pulse. A further lateral expansion of the particle cloud takes place afterwards while even for observation periods of up to 100 ms no significant particle sedimentation can be observed. Above the substrate, both laminar as well as turbulent flows can be used for the removal of particles within a gas-flowed gap. In either case, the particle load of the surface is reduced up to 90 
%F PUB:(DE-HGF)3 ; PUB:(DE-HGF)11
%9 BookDissertation / PhD Thesis
%R 10.18154/RWTH-2018-226897
%U https://publications.rwth-aachen.de/record/730493