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@PHDTHESIS{Hrdemann:730493,
author = {Hördemann, Christian},
othercontributors = {Poprawe, Reinhart and Esen, Cemal},
title = {{P}artikelfreier {A}btrag von {S}chichtsystemen für
{F}eststoffbatterien mittels
{U}ltrakurzpuls-{L}aserbearbeitung; 1. {A}uflage},
school = {RWTH Aachen University},
type = {Dissertation},
address = {Aachen},
publisher = {Apprimus Verlag},
reportid = {RWTH-2018-226897},
isbn = {978-3-86359-648-4},
series = {Ergebnisse aus der Lasertechnik},
pages = {1 Online-Ressource (vi, 153 Seiten) : Illustrationen},
year = {2018},
note = {Veröffentlicht auf dem Publikationsserver der RWTH Aachen
University. - Weitere Reihe: Edition Wissenschaft Apprimus;
Dissertation, RWTH Aachen University, 2018},
abstract = {One promising battery technology is the technology of
solid-state thin-film batteries which are fabricated via
subsequent evaporation deposition of thin battery layers.
Currently, solid-state thin-film batteries are costly since
their production is carried out with manufacturing methods
that are typically used in the semiconductor industry. When
depositing the battery layers one above the other, masks
have to be used that leave out large areas between each
battery cell. These areas cannot be used for further battery
cell production. To improve the production of solid-state
thin-film batteries in terms of its material- and resource
efficiency as well as make an important step towards the
continuous production of this battery-type, roll to roll
manufacturing is beneficial. In continuous flow sputtering-
and deposition equipment, battery layers can be applied to a
foil substrate which can then be cut into single battery
cells creating minimal waste. In this work, an
ultrashort-pulsed laser ablation process for the selective
removal of solid state multilayer systems in an inert gas
atmosphere is developed. Special attention is paid to the
generation of particles that arise from the laser ablation
process and the removal of these. By an analysis of the
particle propagation as well as the conception and
construction of an apparatus for the particle-free
processing of coated foils, conclusions can be drawn about
the achievable surface cleanliness during laser ablation
within a gas-flowed gap. For the laser ablation within the
stack of battery layers it can be deducted, that a
layer-selective removal of the multilayer system can only be
achieved if ultrashort laser pulses in the femtosecond
regime are used. Larger pulse durations lead to unwanted
cracking of the material, resulting in a geometrically
imprecise ablation. The maximum height of particles that are
ejected during ablation is reached during the first 100 µs
after the impact of the laser pulse. A further lateral
expansion of the particle cloud takes place afterwards while
even for observation periods of up to 100 ms no significant
particle sedimentation can be observed. Above the substrate,
both laminar as well as turbulent flows can be used for the
removal of particles within a gas-flowed gap. In either
case, the particle load of the surface is reduced up to 90
$\%.$ The resultant surface cleanliness can be classified
above SCP 5 to 6 according to the SCP cleanliness levels.},
cin = {418710},
ddc = {620},
cid = {$I:(DE-82)418710_20140620$},
typ = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
doi = {10.18154/RWTH-2018-226897},
url = {https://publications.rwth-aachen.de/record/730493},
}
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